LAM 810-099175-013 PCB VIOP PHASE III MODULE CARD In stock

Description

The LAM 810-099175-013 PCB VIOP PHASE III MODULE CARD is a printed circuit board (PCB) that is used in the VIOP PHASE III module of the LAM RESEARCH etch tool. The PCB is responsible for controlling the voltage and current to the etch plasma chamber. It also contains the circuitry for the etch process timers and controllers.

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