Description
The LAM 853-002499-011 appears to be a voltage detector assembly used in Lam Research’s ESC 2300 etcher tool. It is a component of the tool’s plasma power delivery system and is responsible for monitoring the voltage levels in the plasma chamber.
Unfortunately, I don’t have access to detailed specifications or datasheets for the 853-002499-011. However, I can provide some general information about voltage detector assemblies and the ESC 2300 etcher tool.
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